Previous Workshops:
2019
24-26 June 2019 in London
This workshop is aimed not only at current users of the R-matrix codes, but also those researchers in AMO physics who may benefit from learning to use these world-leading tools. The workshop schedule is shown under the ‘Programme’ tab, where we have attempted to provide a flavour of the science enabled by the codes, as well as giving practical guidance on their use.
Find out more details here:
https://rmadam2019.wordpress.com/
Workshops organised in London are generously sponsored by CCPQ project
2018
2015
The forth workshop “Linking Simulation with Experiment”
This workshop will take place on 11 September 2015 in University College London, London, UK.
Program
Talks session:
10.00 – 10.20 Julian Schulze, West Virginia University, “Process Optimization by voltage waveform tailoring in technological plasmas: experiments, simulations, and modeling”
10.20 – 10.40 Peter Ventzek, Tokyo Electron, “A perspective on the requirements for the integration of process through to device modeling and simulation”
10.40 – 10.50 Coffee break
10.50 – 11.10 Mark Kushner, Michigan University, “Coupling of scales in modelling of semiconductor manufacturing”
11.10 – 11.30 Jean-Paul Booth, Ecole Polytechnique, “Inductively-coupled plasmas in Cl2 and O2 : Comparing HPEM with advanced diagnostic measurements”
11.30 – 11.50 Jonathan Tennyson, University College London, “Plasma chemistry data for industrial manufacturing modelling”
11.50 – 12.00 Coffee break
12.00 – 12.20 Sebastian Mohr, Quantemol, “Q-VT modelling of plasma processing on reactor scale”
12.20 – 12.40 Mohamed Oulmane, Synopsys, “Sentaurus Topography 3D: Particle MC surface reaction feature scale modeling and link to HPEM plasma simulation output data “
12.40 – 13.30 Lunch
Hands-on session:
13.30 – 13.50 introduction to Quantemol-VT, how to use it and proposed test case to work with; and Q-N introduction for those interested
13.50 – 14.20 time to do Q-VT/Q-N test cases and ask questions
14.20 – 14.30 Coffee break
14.30 – 14.50 introduction to Synopsys TCAD Sentaurus software and test case examples how to use it
14.50 – 15.30 time to work with Sentaurus + Q-VT
15.30 – 17.00 Closing drinks session
2014
The third workshop “Linking Simulation with Experiment” generously sponsored by CCPQ project.
This workshop will take place on 4th April 2014 in University College London, London, UK.
Program
Talks session
10.00 – 10.20 Dr. Anderson Pires Singulani, ams “Plasma etching challenges in the industry and how simulation can help”.
10.20 – 10.40 Prof. Mark Kushner, University Of Michigan “Case Studies in Plasma Modeling for Device and Equipment Design: Photons, Ions, Pulsing”
10.40 – 10.50 Dr. Christian Hill, University College London “The Virtual Atomic and Molecular Data Center (VAMDC)“
10.50 – 11.00 Coffee break
11.00- 11.20 Dr. Vladimir Kolobov, CFDRC/University of Alabama at Huntsville “Development of Adaptive Kinetic-Fluid Computational Tools for Low Temperature Plasmas”
11.20 – 11.40 Dr. Daniil Marinov, Open University “Development of a neutral beam source for sub-10 nm etching”
11.40 – 11.50 Coffee break
11.50 – 12.10 Dr. Arthur Greb, York Plasma Institute “Diagnostics of the plasma-surface interface: coupling experiments with simulations”
12.10 – 12.30 Prof. Jonathan Tennyson, Quantemol/University College London
12.30 – 13.30 Lunch break
Hands-on session
13.30 – 15.00 Hands-on experience with the Quantemol-VT (industrial plasma tool simulation) and the Quantemol-N (electron scattering simulation) software packages.
15.00 – 15.20 Coffee break
15.20 – 16.30 Hands-on experience with the Quantemol-VT (industrial plasma tool simulation) and the Quantemol-N (electron scattering simulation) software packages.
16.00 – 17.00 Closing drinks
Details of the room locations will be available soon.
2012
The Second Quantemol Workshop
Linking simulation and experiment
Date: 7 November 2012 (Wednesday)
Place: University College London
Preliminary Program
Registration opens at 10 am.
Location: Room E7, ground floor, Physics Building
Morning talks (11am – 1 pm) will include:
11.00-11.05 Introduction word, Anna Dzarasova
11.05-11.25 Dr. Niall Macgearailt (Intel, Ireland), “Plasma diagnostics in Semiconductor processes”
11.25-11.45 Prof. Khaled Hassouni (LSPM, CNRS), “Numerical modeling of reactive discharge plasma. Key collisional processes and data needs for currently developed applications”
11.45-12.00 Dr. Adam Williams (UCL) “New generation of plasma simulations. What is Q-VT?”
12.00-12.20 mini coffee break
12.20-12.40 Dr. Klaus Pressel (Infineon), “Advanced processes for System in Package”
12.40-13.00 Prof. Jan van Dijk (Eindhoven University of Technology) “Atomic and Molecular Input Data for Plasma Modeling: A user’s perspective”
13.00-13.15 Dr. Sergio Lopez-Lopez (Quantemol) “Plasma chemistry importance and database development in Q-VT“
Afternoon software simulations hands-on session (2-4pm):
Location: Room A19, third floor, Physics Building
14.00 – 14.10 Quantemol-N – Plasma chemistry design First Aid (Introduction to the software and how it can be useful)
14.10 – 14.35 Quantemol-D – 2D plasma reactor scale simulations, easier than Photoshop! (Introduction to the software principles and interface)
14.35 – 15.10 Free time to run examples or grab a coffee
15.10 – 15.35 Synopsys, TCAD, Synergy effect (integration with Quantemol-D reactor scale simulations results and introduction to the software)
15.35 – 16.30 Free time to run examples or join the drinks
The closing drinks (4-5pm).
Registration: it is free of charge, just send us an e-mail anna@quantemol.com
Number of places is limited to 30 participants
