The third workshop “Linking Simulation with Experiment” generously sponsored by CCPQ project.
This workshop will take place on 4th April 2014 in University College London, London, UK.
Program
Talks session
10.00 – 10.20 Dr. Anderson Pires Singulani, ams “Plasma etching challenges in the industry and how simulation can help”.
10.20 – 10.40 Prof. Mark Kushner, University Of Michigan “Case Studies in Plasma Modeling for Device and Equipment Design: Photons, Ions, Pulsing”
10.40 – 10.50 Dr. Christian Hill, University College London “The Virtual Atomic and Molecular Data Center (VAMDC)”
10.50 – 11.00 Coffee break
11.00- 11.20 Dr. Vladimir Kolobov, CFDRC/University of Alabama at Huntsville “Development of Adaptive Kinetic-Fluid Computational Tools for Low Temperature Plasmas”
11.20 – 11.40 Dr. Daniil Marinov, Open University “Development of a neutral beam source for sub-10 nm etching”
11.40 – 11.50 Coffee break
11.50 – 12.10 Dr. Arthur Greb, York Plasma Institute “Diagnostics of the plasma-surface interface: coupling experiments with simulations”
12.10 – 12.30 Prof. Jonathan Tennyson, Quantemol/University College London
12.30 – 13.30 Lunch break
Hands-on session
13.30 – 15.00 Hands-on experience with the Quantemol-VT (industrial plasma tool simulation) and the Quantemol-N (electron scattering simulation) software packages.
15.00 – 15.20 Coffee break
15.20 – 16.30 Hands-on experience with the Quantemol-VT (industrial plasma tool simulation) and the Quantemol-N (electron scattering simulation) software packages.
16.00 – 17.00 Closing drinks
Details of the room locations will be available soon.