Program and slides

Workshop title2

The forth workshop “Linking Simulation with Experiment”

This workshop will take place on 11 September 2015 in University College London, London, UK.


Talks session:

10.00 – 10.20 Julian Schulze, West Virginia University, “Process Optimization by voltage waveform tailoring in technological plasmas: experiments, simulations, and modeling”
10.20 – 10.40 Peter Ventzek, Tokyo Electron, “A perspective on the requirements for the integration of process through to device modeling and simulation”

10.40 – 10.50 Coffee break

10.50 – 11.10 Mark Kushner, Michigan University, “Coupling of scales in modelling of semiconductor manufacturing” (powerpoint file with animations Part 1, 34 Mb and powerpoint file with animations Part 2, 40 Mb )
11.10 – 11.30 Jean-Paul Booth, Ecole Polytechnique, “Inductively-coupled plasmas in Cl2 and O2 : Comparing HPEM with advanced diagnostic measurements
11.30 – 11.50 Jonathan Tennyson & Christian Hill, University College London, “Plasma chemistry data for industrial manufacturing modelling”

11.50 – 12.00 Coffee break

12.00 – 12.20 Sebastian Mohr, Quantemol, “Q-VT modelling of plasma processing on reactor scale
12.20 – 12.40 Giovanni Bozza, Synopsys, “Sentaurus Topography 3D: Particle MC surface reaction feature scale modeling and link to HPEM plasma simulation output data “

12.40 – 13.30 Lunch

Hands-on session:

13.30 – 13.50 introduction to Quantemol-VT, how to use it and proposed test case to work with; and Q-N introduction for those interested

13.50 – 14.20 time to do Q-VT/Q-N test cases and ask questions

14.20 – 14.30 Coffee break

14.30 – 14.50 introduction to Synopsys TCAD Sentaurus software and test case examples how to use it

14.50 – 15.30 time to work with Sentaurus + Q-VT

15.30 – 17.00 Closing drinks session



The workshop is sponsored by CCPQ project


CCPQ (Collaborative Computational Project in Quantum dynamics) serves the scientific community simulating the quantum dynamics of atoms and molecules, with a recent increase in focus on the interaction between light and
matter. The network grew out of the old CCP2 (Continuum States of Atoms and Molecules) and CCP6 (Molecular Quantum Dynamics) collaborative projects, which have been funded continuously by the EPSRC since the late 1970s. Its activity encompasses the areas of particle collisions (atoms, molecules, electrons, anti-matter), light-matter interactions and the coherent motion of molecules. CCPQ, and its predecessor CCPs, has been highly influential in developing community codes that bring together work from different groups and has been an efficient mechanism for distributing algorithmic and software advances to the wider community. The challenge is the huge requirement of computer resources for accurate calculations of even small systems. Efficient coding and use of high performance computing (HPC) is key, and CCPQ is essential here, providing support and a platform for exchange of ideas between seemingly different projects