This fall Quantemol team will be presenting at a few events:
Semiconductor Conference Dresden 2011, 27-28 September, Dresden, Germany
28 September (Wednesday)
Session 2.5 “Process Technology”
14.20-14.40, S. López-López et al. “Simulations of SF6 Plasma Etching in the GEC Reference Cell”
AVS 58th International Symposium and Exhibition, 31 October – 4 November, Nashville, US
4 November (Friday)
10:20 – 10.40 AM S. Lopez-Lopez et al. “Simulations of SF6 Plasma Etching in the GEC Reference Cell”
The Gaseous Electronic Conference 2011 (GEC), 14-18 November, Salt Lake City, US
16 November (Wednesday)
Session JW2: Electron-Molecule Collisions
9:30 AM–10:00 AM, J. Tennyson, “Low-energy electron molecule collision calculations with the R-matrix method”
10:45AM – 11:00AM J. Tennyson et al. “Computational studies of inelastic electron-molecule scattering processes with the Quantemol-N system”
17 November (Thursday)
Session NR1: Plasma Etching
11:45AM – 12:00PM J. Tennyson et al. “Simulation study of SF6 plasma etching in the GEC reference cell”
Also please have a look at the examples section, which we have published to demonstrate the capabilities of the Quantemol-D software.
Upcoming examples in next few months include PECVD and Sputtering:
For those who could not make it to our workshop in June this year, please have a look at the video recordings of the talks which were presented.
Of course, these are the shortened versions of the talks and we encourage you to attend our workshop next year and enjoy full talks, discussions and meeting with colleagues.
I hope this was of interest to you and we are looking forward to seeing you soon.