Now you can download from our website a presentation made at GEC AVS conferences:
Dr. James Munro, 7 Oct 4.30 pm, “Simulations of an Ar/HBr/O2 microwave source etch process and the effect of SiBr and SiBr2 cross-sections on computed etch-profiles”
Dr. James Munro, 21 Oct 2.20pm. “Molecular Cross-Section Calculations
Enabling Etch-Profile Simulations of a Microwave Source Silicon Etch using
Thank you very much to everyone who has attended the talk.