Quantemol Presentation from GEC 2010

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Now you can download from our website a presentation made at GEC AVS conferences:

Dr. James Munro, 7 Oct 4.30 pm, “Simulations of an Ar/HBr/O2 microwave source etch process and the effect of SiBr and SiBr2 cross-sections on computed etch-profiles”

Dr. James Munro, 21 Oct 2.20pm. “Molecular Cross-Section Calculations
Enabling Etch-Profile Simulations of a Microwave Source Silicon Etch using
Ar/HBr/O2″

Thank you very much to everyone who has attended the talk.

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