We are pleased to announce that Quantemol representatives will be attending 3 major conferences in the upcoming month:
Dr James Munro, lead plasma physicist software developer, will be attending:
GEC & ICRP 2010, Paris, 4-8 Oct 2010.
Dr. James Munro, 7 Oct 4.30 pm, “Simulations of an Ar/HBr/O$_2$ microwave
source etch process and the effect of SiBr and SiBr$_2$ cross-sections on
computed etch-profiles”
Room: 151
Details: http://meetings.aps.org/Meeting/GEC10/Event/129273
AVS 2010, New Mexico, 17-22 Oct 2010.
Dr. James Munro, 21 Oct 2.20pm. “Molecular Cross-Section Calculations
Enabling Etch-Profile Simulations of a Microwave Source Silicon Etch using
Ar/HBr/O2”
Room: Aztec
Details:
http://www.avssymposium.org/Open/SessionSchedule.aspx?sessionCode=PS1-ThA&item=D.ThA.S25
Anna Dzarasova, Quantemol project manager, will be attending:
Semicon Europa 2010, Dresden, 19-21 Oct 2010.
Please look out for our talks and representatives, if you would like to arrange a meeting with them please feel free to contact us via info@quantemol.com