Quantemol-VT


Quantemol-VT Quantemol-Virtual Tool (Q-VT) is an expert software system for the simulation of industrial plasma processing tools. Q-VT builds upon the comprehensively validated Hybrid Plasma Equipment Model (HPEM) codes developed by renowned plasma physicist Professor Mark Kushner for simulating non-equilibrium low pressure (< 1Torr) plasma processes. Q-VT includes an intuitive user interface, data visualisation and analysis capabilities, and convenient job/batch management. View our 2017 Quantemol-VT brochure.

Applications of Q-VT include:

  • Tool design and development
  • Modelling of discharge and wafer level chemistry kinetics
  • Model etch/deposition uniformity
  • Examine tilting effects (when used with additional feature scale profile model, specifically compatible with Synopsys software)
  • Large wafer size simulation (12 inch and more)

What Q-VT can model:

  • Plasma tool geometry alterations
  • Advanced volume and surface chemistries
  • Variation of key plasma state variables with process parameter changes
  • Ion flux on wafer level: ion energy/ angular distribution functions, and fluxes of all species along the wafer
  • Non-Maxwellian electron dynamics
  • Complex electromagnetic plasma interactions (current coils, permanent magnets, multi-frequency power supply, plasma circuit interactions)

Benefits of Q-VT

  • Experimentally validated simulation system
  • Experimentally validated simulation system focused on modelling plasma tools
  • User-friendly tool-like interface
  • Sets of validated plasma chemistries and cross-sections are provided with the licence
  • Example libraries include numerous chambers
  • Easy-to-use drawing tool for chamber design and modification: a tool simulation set-up service can be provided
  • Ability to model complex plasma phenomena with additional modules (dust/radiation transport, ion kinetics, external circuits, etc.)
  • Multi-run management system for managing large numbers of simulations
  • Advanced reactor scale visualisation of scalar and vector plasma properties
  • Experimental results importing
  • Ability to easily distribute and manage jobs over a cluster

If you already have HPEM code, please note Q-VT can be provided as an HPEM expert system wrapper. Please contact us for a discounted quotation; info@quantemol.com

Quantemol-VT Demonstration