Quantemol-Virtual Tool (Q-VT) is an expert software system for the simulation of industrial plasma processing tools. Q-VT builds upon the comprehensively validated Hybrid Plasma Equipment Model (HPEM) codes developed by renowned plasma physicist Professor Mark Kushner for simulating non-equilibrium low pressure (< 1Torr) plasma processes. Q-VT includes an intuitive user interface, data visualisation and analysis capabilities, and convenient job/batch management. View our 2017 Quantemol-VT brochure.
Applications of Q-VT include:
- Tool design and development
- Modelling of discharge and wafer level chemistry kinetics
- Model etch/deposition uniformity
- Examine tilting effects (when used with additional feature scale profile model, specifically compatible with Synopsys software)
- Large wafer size simulation (12 inch and more)
What Q-VT can model:
- Plasma tool geometry alterations
- Advanced volume and surface chemistries
- Variation of key plasma state variables with process parameter changes
- Ion flux on wafer level: ion energy/ angular distribution functions, and fluxes of all species along the wafer
- Non-Maxwellian electron dynamics
- Complex electromagnetic plasma interactions (current coils, permanent magnets, multi-frequency power supply, plasma circuit interactions)
Benefits of Q-VT
- Experimentally validated simulation system
- Experimentally validated simulation system focused on modelling plasma tools
- User-friendly tool-like interface
- Sets of validated plasma chemistries and cross-sections are provided with the licence
- Example libraries include numerous chambers
- Easy-to-use drawing tool for chamber design and modification: a tool simulation set-up service can be provided
- Ability to model complex plasma phenomena with additional modules (dust/radiation transport, ion kinetics, external circuits, etc.)
- Multi-run management system for managing large numbers of simulations
- Advanced reactor scale visualisation of scalar and vector plasma properties
- Experimental results importing
- Ability to easily distribute and manage jobs over a cluster
If you already have HPEM code, please note Q-VT can be provided as an HPEM expert system wrapper. Please contact us for a discounted quotation; info@quantemol.com
Quantemol-VT Demonstration