Quantemol-P


Quantemol-P

Quantemol-P (Q-P) is an expert software system for the simulation of high pressure plasma (>0.1 Torr) chemistries in 0D. Q-P builds upon the comprehensively validated Global_Kin code, a spatially homogeneous model developed by the renowned plasma physicist Professor Mark Kushner and collaborators. Q-P includes an intuitive user interface, data visualisation and analysis capabilities, and convenient job/batch management.

The etching of silicon wafers using gaseous plasmas underpins the rapid advance in computer technology that has powered the global economy, and will continue to do so for the foreseeable future. Currently, experimental testing is used to establish the relevant plasma mixes to generate the desired etch. Such testing is an expensive and time-consuming process even for relatively minor improvements in the processes. With Q-P much of this process can be achieved outside of the reactor at reduced cost and improved efficiency. View our 2015 Quantemol-P brochure.

What does Quantemol-P do?

Q-P assists in the research for new plasma recipes and optimises given processes by simulating plasma processes. The simulation inputs used by Q-P match those of the plasma processing tools: e.g. power, pressure, gas flow rate, time, volume and plasma reactions involved.

Q-P automatically generates the plasma chemistry, which includes gas and surface reactions, and reactions with the chamber walls. It couples molecular data with models of the plasma, providing information of what is happening, giving the process engineers an insight into the problem.

A variety of technical plasmas can be simulated including plasma etch reactors, plug-flow reactors and well-mixed reactors and atmospheric pressure plasma reactors.

Q-P can become a part of the Quantemol-VT software package as an extra module, which can help to optimise a plasma recipe prior to running a 2D model.

What are the key advantages of Quantemol-P?

  • Based on the Global Model Developed by Professor Mark Kushner (University of Michigan), a strong track record of experimental validation in academic publications
  • Quick tool to perform plasma chemistry calculations with large reaction sets (tested on above 800 reactions) on the scale of minutes
  • Requires basic input, equivalent to the definition of a plasma recipe
  • Recently updated easy-to-use graphical interface eliminates human error and reduces setup time
  • Results presented in a flexible, user friendly form: 1D, 2D and 3D for batch run