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Quantemol modelling tools are suitable for modelling both diatomic and
polyatomic electron-molecule interactions. These have a wide range of
industry applications, notable examples of which are:
- The etching of semiconductor materials utilises
molecules that do not react with silicon surfaces unless they are
subjected to electronic collisions. - These produce highly reactive
radicals and ions in the low-temperature plasmas used in plasma etching
and in plasma-enhanced chemical vapour deposition.
- In industry, CO2 lasers require electron
impact excitation of vibrational and rotational states of the CO2
and N2 to lase (Demaria 1979); hence an accurate knowledge
of the relevant cross-sections is necessary for modelling and
optimisation of the laser system.
- In material science, electron scattering is used to
probe the structure of materials such as molecular crystals (Dorset
1996).
- Electrons in radioactive and chemical waste are
responsible for much of the chemistry that determines how these
chemicals age and change.
- Electron collisions create the reactive molecular
fragments in the plasma devices which are used to destroy undesirable
compounds or remediate NOx in combustion exhaust.
- Evaluation of electron-molecule collision is of
considerable environmental importance.
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